Manuals & Documentation

 

FEI Osirus TEM manual   (access from Yale only)

TEM Cheat Sheet (v2)

FEI Quanta dual beam FIB   (access from Yale only)

Vistec EBPG electron-beam lithography system manuals   (access from Yale only)

EBPG Cheat Sheet

E-beam data preparation (Beamer) Cheat Sheet

AFM Cheat Sheet (little)

Beamer Manual   (access from Yale only)

Instrument charge adjustment form

Electron-beam training material:

     Electron-Beam Lithography Training Presentation

     Electron-Beam Linux Server, getting started   (access from Yale only)

     Layout CAD Tutorial

     Beamer Tutorial

     Cjob Tutorial