Publications & Presentations

 

Development of HSQ resist using a NaOH and NaCl solution

Development of PMMA in cold IPA/water

Resolution limits of HSQ using a VB e-beam exposure tool

 

If you publish work which has made use of YINQE or CRISP facilities, please include the acknowledgement, "Facilities use was supported by YINQE and NSF MRSEC DMR 1119826."